| 摘要 |
PURPOSE: A substrate transfer apparatus is provided to improve a transfer speed of a tray by installing an acceleration/deceleration unit to accelerate or decelerate the transfer speed of the tray with electromagnetic force in a tray. CONSTITUTION: A transfer unit(200) includes a tray bottom rail(210) combined with the lower side of a tray(100) and a plurality of driving rollers(220). The driving roller is rotatably installed in a transfer direction of a substrate. An acceleration/deceleration unit includes a rotary magnet(310), a rotation motor, and a rotation control unit. The rotation magnet rotates the tray in the transfer direction. A guide unit(400) includes a tray top rail(410) combined with the upper side of the tray and a magnetic guide unit(420). |
