| 发明名称 |
Crystalline tantalum film and method of forming it |
| 摘要 |
<p>A metal film has a cubic crystal structure having a periodic pattern of crystal orientation in a plane. The crystal orientation is gradually rotated about a particular crystal-axis direction (15) such that a {100} plane, a {110} plane, and a {111} plane appear.</p> |
| 申请公布号 |
EP1918428(B1) |
申请公布日期 |
2013.10.16 |
| 申请号 |
EP20070015625 |
申请日期 |
2007.08.08 |
| 申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
ISHIZAKI, AKEMI;KIMURA, ISAO;OTSUKA, MITSURU |
| 分类号 |
C30B23/02;C23C14/02;C23C14/16;C23C14/58;C30B29/02 |
主分类号 |
C30B23/02 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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