FURNACE WALL SHAPE MEASURING DEVICE, FURNACE WALL SHAPE MEASURING SYSTEM AND FURNACE WALL SHAPE MEASURING METHOD

摘要

Laser light and self-emitting light of an oven wall for measuring an irregular shape of an oven wall surface are simultaneously obtained while allowing the laser light and the self-emitting light to not interfere with each other and a measurable range in a direction perpendicular to the oven wall surface and an irradiation range of the laser light to be increased. Included are: a slit laser light source 4 that is arranged in a thermally-insulated protection box 3 having a slit-like window 2 and emits slit-like laser light; a laser light mirror 5 that reflects the laser light and irradiates the oven wall surface with the laser light via the window 2; an imaging mirror 6 that reflects reflected light from the oven wall surface due to irradiation of the laser light and self-emitting light emitted from the oven wall surface, which enter the thermally-insulated protection box 3 via the window 2; and an imaging device 8 that images via an optical filter 7 the self-emitting light and the reflected light that are reflected from the imaging mirror 6.