| 摘要 |
PURPOSE: A manufacturing method of zinc oxide thin film using group III salt and oxidation zinc thin film manufactured by the same are provided to manufacture oxidized zinc thin film having a plurality of nano-rods with high aspect ratio. CONSTITUTION: A manufacturing method of zinc oxide thin film using group III salt comprises the following steps: providing a solution for zinc oxide hydrothermal synthesis including the group III salt; placing a substrate(10) in the solution for zinc oxide hydrothermal synthesis; and growing the oxidation zinc thin film(30) by heating the solution for zinc oxide hydrothermal synthesis. The oxidized zinc thin film includes a plurality of nano-rods grown up in the upper direction of the substrate. The nano-rods have the aspect ratio of 5-20. The group III salt which is included in the solution for zinc oxide hydrothermal synthesis includes one or more of Al, Ga and In. |
