| 摘要 |
PURPOSE: A resonant sensor and a surface variation correcting device using the same are provided to perform a correcting process by measuring the surface variation of a contact surface, thereby precisely performing surface variation measurement and correction. CONSTITUTION: A surface variation correcting device using a resonant sensor includes an inductor (L), a capacitor (C), and an inductor-capacitance computing unit (20). One end of the capacitor is fixed to one end of the inductor, and the other end of the capacitor moves along the surface variation of a contact surface. Capacitance is changed according to distance variation between one end and the other end of the capacitor. The inductor-capacitance computing unit measures resonant frequency variation by computing the inductance variation of the inductor and the capacitance variation of the capacitor between the inductor and one end of the capacitor. [Reference numerals] (20) LC calculation unit |
