| 发明名称 |
A micro-opto-electro-mechanical system (MOEMS) |
| 摘要 |
<p>A MEMS-based adjustable mirror module allows faster, lower cost, and easier alignment of optical fibers (10) in substrates. Movable mirrors (131,133) formed on the substrate allow adjustment of the light path after the optical fiber is attached, after which the mirrors are affixed in place to prevent misalignment. <IMAGE></p> |
| 申请公布号 |
EP1255149(B1) |
申请公布日期 |
2013.10.16 |
| 申请号 |
EP20020252944 |
申请日期 |
2002.04.25 |
| 申请人 |
XEROX CORPORATION |
发明人 |
CHEN, JINGKUANG;SUN, DECAI;KUBBY, JOEL A. |
| 分类号 |
G02B26/02;B81B7/02;G02B6/35;G02B6/42;G02B26/08 |
主分类号 |
G02B26/02 |
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