发明名称 |
CERAMIC COMPOSITE FOR PHOTOCONVERSION, AND METHOD FOR MANUFACTURE THEREOF |
摘要 |
Disclosed are a ceramic composite for light conversion with a flat surface obtained even in a solidified body in which the plurality of crystalline phases of oxides is continuously and three-dimensionally entangled with each other and a method for manufacture thereof. A manufacture method of a ceramic composite for light conversion is characterized in that a polishing step is provided in a CMP process applied for the surface of a solidified body with a structure in which an Al 2 O 3 phase and a crystalline phase of oxides other than Al 2 O 3 are continuously and three-dimensionally entangled with each other, and pH of a polishing liquid is adjusted between 11 and 12 when performing the CMP process. A ceramic composite for light conversion includes a solidified body with a structure, in which an Al 2 O 3 phase and a crystalline phase of oxides other than Al 2 O 3 are continuously and three-dimensionally entangled with each other and the step level difference between Al 2 O 3 phase and a crystalline phase of oxides other than Al 2 O 3 on the surface of the solidified body is equal to 0.010 µm or less. |
申请公布号 |
EP2650082(A1) |
申请公布日期 |
2013.10.16 |
申请号 |
EP20110846090 |
申请日期 |
2011.12.02 |
申请人 |
UBE INDUSTRIES, LTD. |
发明人 |
INAMORI, DAI;KAWANO, TAKAFUMI;DOI, TOSHIRO;KUROKAWA, SYUHEI |
分类号 |
B24B37/00;C09K3/14;C09K11/08;C09K11/80;H01L21/304;H01L33/50 |
主分类号 |
B24B37/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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