| 摘要 |
<p>PURPOSE: A device to grind a substrate is provided to correct a wheel, which grinds an edge of the substrate, for wearing by measuring the wearing quantity of the wheel. CONSTITUTION: A device (100) to grind a substrate comprises a Z-axis slider (120), a cylinder (121), a grinding member (130), a measuring member, and a correcting member. The grinding member includes a wheel (132), a spindle(131), and a contact plate (133) and is connected to be movable along a Z-axis relative to the Z-axis slider. The measuring member measures the wearing quantity of the wheel. The correcting member moves the Z-axis slider along the Z-axis according to the wearing quantity of the wheel which is measured by the measuring member.</p> |
