| 摘要 |
<p>By a substrate support member moving in predetermined strokes in a scanning direction on a Y step surface plate, a substrate held by the substrate support member moves in the scanning direction in predetermined strokes in a state supported from below by an air floating device. Further, because a Y step guide having an air floating device moves in a cross-scan direction along with the substrate holding member, the substrate can be moved optionally in the scanning direction, and/or in the cross-scan direction. In doing so, because the Y step surface plate moves in the cross-scan direction with the substrate support member and the Y step guide, the substrate support member is constantly supported by the Y step surface plate.</p> |
