| 摘要 |
PURPOSE: A method for manufacturing a semiconductor device, a substrate processing apparatus, an evaporating system, and a mist filter are provided to easily form a film on a substrate by using liquid materials. CONSTITUTION: The quantity of particles is decreased by using liquid materials. A substrate is inputted to a processing chamber. The liquid materials are inputted to a mist filter (300). The mist filter is formed by combining at least two kinds of plates (320,330) which include holes (322,332). |
