| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning transmission electron microscope capable of accurately and quickly aligning a direction of an orientation of crystalline sample. SOLUTION: A crystal arrangement direction of the sample in a scanning transmission image and a direction of an electron beam diffraction image are to be coincided with each other in crystal orientation direction alignment using the scanning transmission image and the electron beam diffraction image. For example, a light receiving surface of a TV camera for photographing the electron beam diffraction image is directly and indirectly rotated by operating in linking with the crystal arrangement direction of the sample of the scanning transmission image. Further, the direction of the electron beam diffraction image is changed with an action of an electromagnetic lens, for instance, by changing current conducted to a plurality of projection lenses. When aligning the crystal direction of the sample to an optical axis of a scanning transmission electron microscope, accurate and quick crystal direction alignment can be performed since a direction for inclining the sample can be directly determined from the shape of the electron beam diffraction image. COPYRIGHT: (C)2011,JPO&INPIT
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