| 摘要 |
PURPOSE: A tray for transporting a substrate is provided to stably transport the large substrate without damage by preventing stress concentration due to vibration and bending due to weight. CONSTITUTION: A frame(110) includes a main frame(111) and a plurality of sub frames(112). The main frame is larger a substrate. The plurality of sub frames connects the main frame from the inner side of the main frame. The plurality of sub frame includes an intake and exhaust pipe(112a) providing pneumatic pressure to an adhesion and separation unit. The adhesion and separation unit attaches the substrate or separates the attached substrate. |
