A method for forming by CVD a lithium-based layer, according to which the lithium precursor is in liquid form in a mixture containing a solvent and a Lewis base.
申请公布号
EP2649216(A1)
申请公布日期
2013.10.16
申请号
EP20110811047
申请日期
2011.12.08
申请人
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIESALTERNATIVES;ANNEALSYS
发明人
JODIN, LUCIE;ACHATZ, PHILIPP;DECAMS, JEAN-MANUEL;DESCHANVRES, JEAN-LUC;JIMENEZ AREVALO, MARIA DEL CARMEN;POULET, SYLVAIN
