发明名称 Sensor device, manufacturing method of sensor device and electronic apparatus
摘要 A sensor device (1) includes a first sensor element (30z) which detects an angular velocity around z axis and a second sensor element (30x) which detects an angular velocity around x axis. When the drive frequency of the first sensor element (30z) is set to fd1, the drive frequency of the second sensor element (30x) is set to fd2, the mistuned frequency (i.e. the difference between the drive frequency and the detection frequency) of the first sensor element (30z) is set to fm1, and the mistuned frequency of the second sensor element (30x) is set to fm2, the relationships fd1 > fd2 and fm1 < fm2 are satisfied.
申请公布号 EP2650641(A1) 申请公布日期 2013.10.16
申请号 EP20130163059 申请日期 2013.04.10
申请人 SEIKO EPSON CORPORATION 发明人 SHIBATA, TSUNENORI
分类号 G01C19/5607;G01C19/5628 主分类号 G01C19/5607
代理机构 代理人
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