发明名称 |
MICROELECTROMECHANICAL SENSOR MODULE AND CORRESPONDING PRODUCTION METHOD |
摘要 |
A microelectromechanical sensor module includes a sensing mechanism for measuring an acceleration, pressure, air humidity or the like, a control mechanism for controlling the sensing mechanism, an energy supply mechanism for supplying the sensor module with energy, and a transmission mechanism for transmitting signals of the sensing mechanism. At least three of the mechanisms are integrated at the chip level in at least one chip in each case. A corresponding method is implemented to produce the microelectromechanical sensor module. |
申请公布号 |
EP2649646(A2) |
申请公布日期 |
2013.10.16 |
申请号 |
EP20110770426 |
申请日期 |
2011.10.14 |
申请人 |
ROBERT BOSCH GMBH |
发明人 |
PIRK, TJALF;WAGNER, THOMAS;FEYH, ANDO;BISCHOPINK, GEORG;FRANKE, AXEL |
分类号 |
H01L25/16;G01C19/56 |
主分类号 |
H01L25/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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