Form measuring device and method of aligning form data

摘要

A form measuring device includes: a measuring unit configured to detect a height at each position in a reference axis direction of a measured object 4 and measure a cross-sectional form of the measured object 4; and an arithmetic unit 10 configured to synthesize a plurality of form measurement data, obtained by repeated measurements of the form of the same measured object by the measuring unit, and calculate synthesized form measurement data. In the synthesis of the form measurement data, the arithmetic unit 10 is configured to calculate shift amounts in the reference axis direction and a height direction of the form measurement data with respect to the synthesized form measurement data and align the form measurement data in the reference axis direction and the height direction based on the calculated shift amount.