| 摘要 |
PURPOSE: A multifunctional measuring device using the optical characteristic variation of a film surface, a sensing film used to the same, and a manufacturing method thereof are provided to accurately measure the pressure, kind, and concentration of materials such as gas, steam, and others at the same time. CONSTITUTION: A multifunctional measuring device (1) using the optical characteristic variation of a film surface comprises a housing (10), a sensing film (15), a light irradiating and receiving part (19), and an analyzing part (27). The housing comprises upper and lower housings (11,12). The sensing film is arranged between the upper and lower housings to divide the housing into a pressure chamber (13) and a measuring chamber (14). The light irradiating and receiving part irradiates light to the sensing film and receives light reflected from the sensing film. The analyzing part analyzes the pressure, kind, and concentration of materials according to the optical characteristics of the light receiving through the optical fiber (20) of the light irradiating and receiving part. |
