HETEROJUNCTION SILICON SOLAR CELL HAVING ULTRA HIGH EFFICIENCY AND PREPARATION METHOD THEREOF

摘要

PURPOSE: A hetero-junction silicon solar cell and a manufacturing method thereof are provided to increase a surface area of a crystalline silicon substrate by forming an amorphous thin film laminated body on an amorphous silicon substrate. CONSTITUTION: An emitter layer(110) is formed at the upper side of a crystalline silicon substrate. Texture is formed by etching the crystalline silicon substrate with a lithography method. A passivation layer(120) is formed at the upper side of the emitter layer. An amorphous thin film laminated body(130) is formed at the upper side of the passivation layer. A front side electrode(140) is formed at the upper side of the amorphous silicon layer. A rear side electrode(150) is formed at the rear side of the crystalline silicon substrate.