发明名称 |
Charged particle beam device |
摘要 |
The present invention provides a charged particle beam device in which the change of expansion/contraction of a specimen which is an observing object is restricted thereby eliminating position deviation of the observing object and significantly increasing its throughput. The present invention includes specimen holding means for holding a specimen, temperature regulation means which can regulate the temperature of the specimen, and temperature regulation means control means which can control the temperature regulation means based on various conditions.
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申请公布号 |
US8558193(B2) |
申请公布日期 |
2013.10.15 |
申请号 |
US201013382396 |
申请日期 |
2010.05.14 |
申请人 |
MAEDA SHUSAKU;ISHIGURO KOUJI;HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
MAEDA SHUSAKU;ISHIGURO KOUJI |
分类号 |
G01N23/225 |
主分类号 |
G01N23/225 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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