发明名称 Semiconductor device with diffused MOS transistor and manufacturing method of the same
摘要 It is desirable to reduce chip area, lower on resistance and improve electric current driving capacity of a DMOS transistor in a semiconductor device with a DMOS transistor. On the surface of an N type epitaxial layer, a P+W layer of the opposite conductivity type (P type) is disposed and a DMOS transistor is formed in the P+W layer. The epitaxial layer and a drain region are insulated by the P+W layer. Therefore, it is possible to form both the DMOS transistor and other device element in a single confined region surrounded by an isolation layer. An N type FN layer is disposed on the surface region of the P+W layer beneath the gate electrode. An N+D layer, which is adjacent to the edge of the gate electrode of the drain layer side, is also formed. P type impurity layers (a P+D layer and a FP layer), which are located below the drain layer, are disposed beneath the contact region of the drain layer.
申请公布号 US8558307(B2) 申请公布日期 2013.10.15
申请号 US20070958531 申请日期 2007.12.18
申请人 KIKUCHI SHUICHI;NAKAYA KIYOFUMI;TANAKA SHUJI;SANYO SEMICONDUCTOR CO., LTD.;SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC 发明人 KIKUCHI SHUICHI;NAKAYA KIYOFUMI;TANAKA SHUJI
分类号 H01L29/66 主分类号 H01L29/66
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