APPARATUS FOR MANUFACTURING SILICON SUBSTRATE

摘要

PURPOSE: An apparatus for manufacturing a silicon substrate is provided to improve cooling efficiency by installing a cooling part including a gas spray part on the upper surface of a casting part. CONSTITUTION: A crucible part (200) has a discharge part on one side thereof. A casting part (300) is extended from the discharge part and includes a casting space. A dummy bar is inserted from one side of the casting part to the casting space. A cooling part is installed on one side of the casting part.