| 发明名称 |
Method and installation for exposing the surface of an integrated circuit |
| 摘要 |
The invention relates to a method for exposing an integrated circuit by ablating the polymer coating initially covering the integrated circuit, characterized in that it includes the combined application of a laser radiation and a plasma onto the coating initially covering the integrated circuit. |
| 申请公布号 |
US8555728(B2) |
申请公布日期 |
2013.10.15 |
| 申请号 |
US20070521444 |
申请日期 |
2007.12.12 |
| 申请人 |
DESPLATS ROMAIN;OBEIN MICHAEL;CENTRE NATIONAL D'ETUDES SPATIALES |
发明人 |
DESPLATS ROMAIN;OBEIN MICHAEL |
| 分类号 |
G01N3/24 |
主分类号 |
G01N3/24 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
