发明名称 Deposition source
摘要 A deposition source capable of uniformly producing a deposition film. The deposition source includes a furnace, a first heating unit surrounding the furnace to heat the furnace and a second heating unit spaced-apart from the first heating unit by an interval and surrounding the furnace to heat the furnace, wherein the second heating unit comprises a plurality of separate sub-heating units that surround the furnace.
申请公布号 US8557046(B2) 申请公布日期 2013.10.15
申请号 US20100769879 申请日期 2010.04.29
申请人 LEE JONG-WOO;KIM TAE-SEUNG;JI CHANG-SOON;CHO WON-SEOK;SHIM HEY-YEON;JO YONG-HUN;HAN SANG-JIN;SAMSUNG DISPLAY CO., LTD. 发明人 LEE JONG-WOO;KIM TAE-SEUNG;JI CHANG-SOON;CHO WON-SEOK;SHIM HEY-YEON;JO YONG-HUN;HAN SANG-JIN
分类号 C23C16/00 主分类号 C23C16/00
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