发明名称 |
Imaging apparatus and imaging method |
摘要 |
An imaging apparatus analyzes a periodic pattern of a Moiré due to Talbot interference by the Fourier transform method and forms an image. The imaging apparatus includes a first grating having a structure that transmits light beams from a beam source to refract or diffract the light beams and forms a self image based on a first periodic pattern by the Talbot interference at a predetermined position; a second grating that absorbs part of the first periodic pattern and causes a Moiré to be generated based on a second periodic pattern when the second grating is arranged at a position at which the self image is formed. All cross sections of the Moiré with axes in differential directions of a wavefront for the analysis by the Fourier transform method have a two-dimensional periodic structure in which periods of patterns in the second periodic pattern are the same.
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申请公布号 |
US8559594(B2) |
申请公布日期 |
2013.10.15 |
申请号 |
US201113085199 |
申请日期 |
2011.04.12 |
申请人 |
OUCHI CHIDANE;NAGAI KENTARO;CANON KABUSHIKI KAISHA |
发明人 |
OUCHI CHIDANE;NAGAI KENTARO |
分类号 |
G03H5/00 |
主分类号 |
G03H5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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