| 摘要 |
An exemplary vibrating structure gyroscope includes a ring structure, an external frame and a flexible support including a pair of symmetrical compliant legs arranged to retain the ring structure within the external frame. A metal track is provided on an upper surface of the ring structure, the compliant legs and the external frame, over an insulating surface oxide layer. Each flexible support is arranged to carry a metal track associated with a single drive or pick-off transducer. The metal track is repeated for eight circuits, one circuit for each transducer. Each circuit of metal track associated with a transducer begins at a first bond-pad on the external frame, runs along a first compliant leg, across an eighth segment of the ring structure and back along the other compliant leg to a second bond-pad on the external frame.
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