摘要 |
A photo diode array includes: a substrate having a major face and a back face; photo diodes separated from each other and arrayed in parallel on the major face of the substrate and being linear in a plan view facing the major face of the substrate; a buried layer between the photo diodes and including a separating channel having a V-shape cross section; and a first metal mirror on an inclined face of the separating channel, reflecting incident light entering from the back face of the substrate, and leading the incident light to light-absorbing layers of the photo diodes. Band gap energy of the buried layer is wider than band gap energies of the light-absorbing layers.
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