POLY SILICON MANUFACTURING APPARATUS HAVING OXIDATION SOURCE INPUTTING PART OR PLASMA INPUTTING PART AND MANUFACTURING METHOD USING THE SAME

摘要

PURPOSE: A manufacturing device for poly-silicon and a method thereof are provided to remove impurities included in silicon raw materials by not only oxidation refining through oxidation source but volatilization refining through the electronic beam. CONSTITUTION: A manufacturing device for poly-silicon comprises a vacuum chamber (100), electronic beam irradiations (200), a silicon melting part (300), a one-way solidification part (400) and an oxidation source input part (600). Particle shaped silicon raw materials are loaded in the silicon melting part and are fused by electronic beam in order to make silicone molten metal. Cooling channels (C) are formed in lower part of the one-way solidification part and coagulates the silicone molten metal supplied from the silicon melting part. The oxidation source input part injects the oxidant and reaction gas into the silicon raw material equipped inside the vacuum chamber in order to remove impurities. [Reference numerals] (AA,BB) Cooling water