| 发明名称 |
ARRANGEMENT FOR TOOL EQUIPMENT |
| 摘要 |
<p>An arrangement comprising ancillary equipment mounted to a semiconductor processing tool and service center remote from the semiconductor processing tool minimizing the local space requirements and facilitates easy access for repair.</p> |
| 申请公布号 |
KR101317997(B1) |
申请公布日期 |
2013.10.14 |
| 申请号 |
KR20087001069 |
申请日期 |
2006.06.28 |
| 申请人 |
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发明人 |
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| 分类号 |
F16K27/00;H01L21/00;H01L21/02;H01L21/68 |
主分类号 |
F16K27/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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