| 摘要 |
A photoresist pump is provided to prevent an apparatus from being damaged by malfunction by automatically adjusting discharge of photoresist according to the pressure intensity increased/decreased of injected photoresist in a coating process of a liquid crystal display device. Photoresist is received in a photoresist tube(162). A large-diameter bellows(164-1) is vertically extended to contract/expand the photoresist tube. A small-diameter bellows(164-2) is vertically extended to contract/expand the photoresist tube. A holder(165) vertically expands/contracts the large-diameter bellows and the small-diameter bellows. A driving control unit controls driving of the holder according to the pressure intensity generated by the photoresist in the photoresist tube, including a pressure sensor(166-1), a pressure gauge(166-2), a control part(167) and a holder driving part(168). The pressure sensor detects the pressure generated by the photoresist in the photoresist tube. The pressure gauge measures the pressure intensity detected by the pressure sensor. The control part controls the driving of the holder according to the pressure value measured by the pressure gauge. The holder driving part drives or stops the holder according to the control of the control part. |
