发明名称 |
CLEANING COMPOUND AND METHOD AND SYSTEM FOR USING THE CLEANING COMPOUND |
摘要 |
PURPOSE: A cleaning compound and a method and system for using the same are provided to stabilize a solution by ionizing the fatty acid of the solution. CONSTITUTION: A solid component (109) is dispersed inside a continuous liquid medium (107). An immiscible component is dispersed inside the continuous liquid medium. The continuous liquid medium is aqueous or non-aqueous. The immiscible component is defined by a liquid droplet in the continuous liquid medium. The solid component is dispersed in suspension inside the continuous liquid medium. [Reference numerals] (105) Wafer |
申请公布号 |
KR20130112847(A) |
申请公布日期 |
2013.10.14 |
申请号 |
KR20130116973 |
申请日期 |
2013.09.30 |
申请人 |
LAM RESEARCH CORPORATION |
发明人 |
FREER ERIC M.;RAVKIN MICHAEL;DE LARIOS JOHN M.;KOROLIK MIKHAIL;MIKHAYLICHENKO KATRINA;REDEKER FRED C. |
分类号 |
H01L21/304;B08B3/08;C11D1/28 |
主分类号 |
H01L21/304 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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