发明名称 CLEANING COMPOUND AND METHOD AND SYSTEM FOR USING THE CLEANING COMPOUND
摘要 PURPOSE: A cleaning compound and a method and system for using the same are provided to stabilize a solution by ionizing the fatty acid of the solution. CONSTITUTION: A solid component (109) is dispersed inside a continuous liquid medium (107). An immiscible component is dispersed inside the continuous liquid medium. The continuous liquid medium is aqueous or non-aqueous. The immiscible component is defined by a liquid droplet in the continuous liquid medium. The solid component is dispersed in suspension inside the continuous liquid medium. [Reference numerals] (105) Wafer
申请公布号 KR20130112847(A) 申请公布日期 2013.10.14
申请号 KR20130116973 申请日期 2013.09.30
申请人 LAM RESEARCH CORPORATION 发明人 FREER ERIC M.;RAVKIN MICHAEL;DE LARIOS JOHN M.;KOROLIK MIKHAIL;MIKHAYLICHENKO KATRINA;REDEKER FRED C.
分类号 H01L21/304;B08B3/08;C11D1/28 主分类号 H01L21/304
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