| 摘要 |
PURPOSE: A micro-electro mechanical system (MEMS) device and a manufacturing method thereof are provided to increase the sensitivity and electrostatic capacitance variation of the MEMS device. CONSTITUTION: An MEMS device (200) comprises a substrate (210), a movable electrode (230), and a penetrated counter electrode (250). The movable electrode and the penetrated counter electrode are mechanically connected to the substrate. The movable electrode comprises radial corrugation lines in an internal space and circumferential corrugation lines in an external space. The penetrated counter electrode comprises ridges. |
