APPARATUS AND METHOD OF CONTROLLING LASER OUTPUT PULSE FOR LASER PROCESSING UNIFORMITY

摘要

PURPOSE: A laser output pulse controlling device for laser processing uniformity and a method thereof are provided to improve the uniformity of laser processing by securing a stable laser output pulse. CONSTITUTION: An output pulse controlling device comprises a laser oscillator (110), an acoustic-optical deflector (120), an acoustic-optical deflecting driver (130). A laser modulating signal is inputted to the laser oscillator for discharging a laser beam (L) of a first laser output pulse (P1). The acoustic-optical deflector receives a laser beam discharged from the laser oscillator. The acoustic-optical driver inputs an acoustic-optical deflecting signal to the acoustic-optical deflector for discharging the laser beam of a second laser output pulse (P2) from the acoustic-optical deflector.