| 摘要 |
PURPOSE: A handler for high speed test of a semiconductor device for high temperature is provided to minimize the productivity reduction in a high temperature test and maintain the same productivity at room temperature. CONSTITUTION: A loader peaker transfers a semiconductor device to a shuttle type pre-heater. The transferred semiconductor device is heated by a heating plate of a shuttle. A jig(9a) fixes a guide pin mask(9b) and minimizes the size of the guide pin mask by moving a cylinder(9c) to two positions. A contactor is arranged by the guide pin(10) of the guide pin mask. The shuttle type pre-heater(8) waits after being moved to a longitudinal direction of a position which picks up a material. A shuttle fixed type guide pin is guided in the guide hole of the shuttle type pre-heater and minimizes a pickup position error. |
