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发明名称
接触式影像感测单元之晶圆切割方法
摘要
一种接触式影像感测单元之晶圆切割方法,包括提供一包含有复数个矩形晶片之晶圆,相邻晶片短边之间距系为宽切割道,而相邻晶片长边之间距系为长切割道;其切割之方式系以晶圆切割刀切割该等宽切割道,而以雷射切割该等长切割道。
申请公布号
TWI412073
申请公布日期
2013.10.11
申请号
TW097117067
申请日期
2008.05.08
申请人
菱光科技股份有限公司 新北市新店区宝桥路235巷128号6楼
发明人
陈鸿吉;李政;贾礼卫
分类号
H01L21/304;H01L27/146
主分类号
H01L21/304
代理机构
代理人
谢佩玲 台北市大安区罗斯福路2段107号12楼
主权项
地址
新北市新店区宝桥路235巷128号6楼
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