发明名称 PROCEDE DE FABRICATION D'UNE STRUCTURE COMPOSITE A SEPARER PAR EXFOLIATION
摘要 The invention relates to a method for fabricating a composite structure comprising a layer to be separated by irradiation, the method comprising the formation of a stack containing: a support substrate formed from a material that is at least partially transparent at a determined wavelength; a layer to be separated; and a separation layer interposed between the support substrate and the layer to be separated, the separation layer being adapted to be separated by exfoliation under the action of radiation having a wavelength corresponding to the determined wavelength. Furthermore, the method comprises, during the step for forming the composite step, a treatment step modifying the optical properties in reflection at the interface between the support substrate and the separation layer or on the upper face of the support substrate.
申请公布号 FR2980279(B1) 申请公布日期 2013.10.11
申请号 FR20110058330 申请日期 2011.09.20
申请人 SOITEC 发明人 FIGUET CHRISTOPHE;GOURDEL CHRISTOPHE
分类号 G02F1/015;B32B5/00 主分类号 G02F1/015
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