| 摘要 |
PURPOSE: A boat for preventing the deformation of substrates is provided to improve the uniformity of a substrate cooling process by tightly attaching the substrates to a substrate holder in a substrate cooling process due to air pressure. CONSTITUTION: A first gas line is formed at the inner side of vertical frames(230a, 230b). A second gas line is formed at the inner side of a holder supporting rod. A third gas line is formed at the inner side of a substrate holder. The gas lines are in a continuous connection. A gas line connecting part(510) is in connection with the gas lines. A vacuum generating part is arranged at the end of the gas line connecting part. |
