发明名称 PROCEDE DE SEPARATION D'UNE COUCHE DANS UNE STRUCTURE COMPOSITE
摘要 <p>The disclosure relates to a method for separating a layer from a composite structure, the structure comprising a composite stack formed from at least a support substrate, which is partially transparent at a determined wavelength, the layer to be separated and a separation layer interposed between the support substrate and the layer to be separated, the method comprising irradiation of the separation layer through the support substrate by means of incident light ray at the determined wavelength in order to induce weakening or separation by exfoliation of the separation layer, the light ray being inclined so as to form an angle of incidenceΘsuch thatθ>θmin, whereθmin=sin−1((n1/n0)sin(tan−1(s/2h))), n1 and n0, respectively, being the refractive index of the support substrate and the refractive index of the external medium in contact with the support substrate, from which the ray comes, S being the width of the ray and h being the thickness of the support substrate.</p>
申请公布号 FR2980280(B1) 申请公布日期 2013.10.11
申请号 FR20110058331 申请日期 2011.09.20
申请人 SOITEC 发明人 LANDRU DIDIER
分类号 G02F1/015 主分类号 G02F1/015
代理机构 代理人
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