发明名称 SEMICONDUCTOR DEVICES INCLUDING DUAL GATE STRUCTURES AND METHODS OF FORMING SUCH SEMICONDUCTOR DEVICES
摘要 <p>Semiconductor devices including dual gate structures and methods of forming such semiconductor devices are disclosed. For example, semiconductor devices are disclosed that include a first gate stack that may include a first conductive gate structure formed from a first material, and a second gate stack that may include a dielectric structure formed from an oxide of the first material. For another example, methods including forming a high-K dielectric material layer over a semiconductor substrate, forming a first conductive material layer over the high-K dielectric material layer, oxidizing a portion of the first conductive material layer to convert the portion of the first conductive material layer to a dielectric material layer, and forming a second conductive material layer over both the conductive material layer and the dielectric material layer are also disclosed.</p>
申请公布号 KR101317091(B1) 申请公布日期 2013.10.11
申请号 KR20117016227 申请日期 2009.12.29
申请人 发明人
分类号 H01L21/336;H01L29/78 主分类号 H01L21/336
代理机构 代理人
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