| 摘要 |
PROBLEM TO BE SOLVED: To provide a rotary shaft supporting mechanism capable of significantly suppressing swinging of a rotary shaft of a vacuum apparatus to be introduced into a hollow rotary introducing machine and capable of improving convenience, and to provide a rotation introducing mechanism having the rotary shaft supporting mechanism.SOLUTION: A rotary shaft supporting mechanism 40 is mounted on a hollow rotary introducing machine which includes: at least a mounting flange 41 that can be mounted on a vacuum vessel; a rotary flange 13 that is rotatably supported by the mounting flange; and a hollow part therein that can be sealed with a gasket 20. The rotary shaft supporting mechanism includes a guide tube 42 which is extended along an extending direction of a rotary shaft 1 rotatable with the rotation of the rotary flange, wherein the one end side of the rotary shaft 1 is axially inserted into the gasket 20 and into the hollow rotary introducing machine so as to extend into the vacuum vessel. In the rotary shaft supporting mechanism, a bearing mechanism is constituted by a first outer ring 44 arranged at a distal end side of the guide tube, a rolling element 43, a spring 45, a fixing screw 46 and a distal end portion 1b of the rotary shaft. |
