发明名称 P-TYPE SEMICONDUCTOR MATERIAL, AND PHOTOELECTRIC CONVERSION DEVICE MANUFACTURE METHOD
摘要 PROBLEM TO BE SOLVED: To provide an oxide semiconductor material having p-type conductivity, and a photoelectric conversion device manufacture method.SOLUTION: A method includes mixing molybdenum trioxide (MoO) with a reducing agent, heating the mixture under a reduced pressure to reduce part of molybdenum trioxide, and vaporizing molybdenum trioxide and said reduced molybdenum oxide, thereby forming a molybdenum oxide film containing molybdenum oxide of an intermediate composition between molybdenum dioxide and molybdenum trioxide, namely, MoO(2<y<3).
申请公布号 JP2013211397(A) 申请公布日期 2013.10.10
申请号 JP20120080227 申请日期 2012.03.30
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 KATAISHI RIHO;ASAMI YOSHINOBU;YAMAZAKI SHUNPEI
分类号 H01L21/365;H01L31/04 主分类号 H01L21/365
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