| 发明名称 |
SEMICONDUCTOR THIN FILM, THIN FILM TRANSISTOR AND PRODUCTION METHOD THEREFOR |
| 摘要 |
A semiconductor thin film includes one or more amorphous metal oxides, an OH group being bonded to at least some of the metal atoms of the amorphous metal oxides.
|
| 申请公布号 |
US2013264565(A1) |
申请公布日期 |
2013.10.10 |
| 申请号 |
US201113878937 |
申请日期 |
2011.10.11 |
| 申请人 |
NISHIMURA MAMI;KAWASHIMA EMI;KASAMI MASASHI;MATSUURA MASAHIDE;ITOSE MASAYUKI;IDEMITSU KOSAN CO., LTD. |
发明人 |
NISHIMURA MAMI;KAWASHIMA EMI;KASAMI MASASHI;MATSUURA MASAHIDE;ITOSE MASAYUKI |
| 分类号 |
H01L29/24;H01L29/66;H01L29/786 |
主分类号 |
H01L29/24 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
