| 摘要 |
In order to make it possible to easily distinguish between energies or angles of secondary particles released from a sample, and to make it possible to easily set optimum observation conditions, the charged particle beam device of the present invention is characterized by being provided with a charged particle source for releasing a charged particle beam, a lens for focusing the charged particle beam on a sample, a detector for detecting a secondary particle released from the sample, and a trajectory simulator for calculating a position reached by a secondary particle released from the sample, the trajectory of a secondary particle that satisfies a predetermined condition being calculated by the trajectory simulator, and a sample image being formed using a signal detected at the position at which the secondary particle that satisfies the predetermined condition reaches the detector. |
