发明名称 |
COATING LIQUID FOR FORMING METAL OXIDE THIN FILM, METAL OXIDE THIN FILM, FIELD EFFECT TRANSISTOR, AND METHOD FOR PRODUCING THE FIELD EFFECT TRANSISTOR |
摘要 |
<p>A coating liquid for forming a metal oxide thin film, the coating liquid including: an inorganic indium compound; at least one of an inorganic magnesium compound and an inorganic zinc compound; and a glycol ether.</p> |
申请公布号 |
KR20130111599(A) |
申请公布日期 |
2013.10.10 |
申请号 |
KR20137016460 |
申请日期 |
2011.11.22 |
申请人 |
RICOH CO., LTD. |
发明人 |
NAKAMURA YUKI;UEDA NAOYUKI;ABE YUKIKO;SONE YUJI |
分类号 |
H01L21/336;H01L29/78 |
主分类号 |
H01L21/336 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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