摘要 |
PROBLEM TO BE SOLVED: To improve the accuracy of the sensing of an elastic wave sensor.SOLUTION: An elastic wave sensor 1 includes; a piezoelectric substance 2; an excitation IDT electrode 3 formed on the piezoelectric substance 2 for exciting a plate wave; a reception IDT electrode 4 for receiving the plate wave excited by the excitation IDT electrode 3 formed on the piezoelectric substance 2; a first reaction part 5 directly or indirectly formed on the upper surface of the piezoelectric substance 2 between the excitation IDT electrode 3 and the reception IDT electrode 4, and configured to react to a detection object substance or a connection substance connected to the detection object substance; and a second reaction part 9 directly or indirectly formed on the lower face of the piezoelectric substance 2, and configured to react to or to be fixed to the detection object substance or the connection substance connected to the detection object substance. |