发明名称 APPARATUS FOR FORMING MEMORY LINES AND VIAS IN THREE DIMENSIONAL MEMORY ARRAYS USING DUAL DAMASCENE PROCESS AND IMPRINT LITHOGRAPHY
摘要 A memory layer in a three-dimensional memory array is provided. The memory layer includes a plurality of memory lines and vias formed by a damascene process using an imprint lithography template having a plurality of depths, wherein at least one depth corresponds to the memory lines and wherein at least one depth corresponds to the vias, and a plurality of memory cells operatively coupled to the memory lines. Numerous other aspects are disclosed.
申请公布号 US2013264675(A1) 申请公布日期 2013.10.10
申请号 US201313911294 申请日期 2013.06.06
申请人 SANDISK 3D LLC 发明人 SCHEUERLEIN ROY E.
分类号 H01L21/48;H01L23/538;H01L27/10 主分类号 H01L21/48
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