SOL-GEL SOLUTION FOR USE IN FORMING FERROELECTRIC THIN FILM

摘要

PURPOSE: A sol-gel liquid makes a layer being spread at one time thick when forming a ferroelectric PZT thin film and makes the PZT film after a calcination crackless and dense. CONSTITUTION: A sol-gel liquid for forming a ferroelectric thin film contains a PZT-based compound, a polymer compound containing polyvinylpyrrolidone for controlling viscosity, and an organic dopant containing formamide-based solvent. The amount of the PZT-based compound contained is 17 wt% or greater. The molar ratio of the polyvinylpyrrolidone to the PZT-based compound is 1:0.1-0.5. The amount of the formamide-based solvent contained is 3-13 wt% of the amount of the sol gel liquid. [Reference numerals] (AA) Example 4