HONEY CONE HEATERS FOR INTEGRATED CIRCUIT MANUFACTURING

摘要

PURPOSE: Honey cone heaters are provided to reduce the non-uniformity of a wafer heating process by including non-planar top surfaces. CONSTITUTION: A lamp housing (27) has an outer edge. The outer edge is partially circular. The lamp housing has an opening part. A plurality of lamps (30) are distributed in the lamp housing. The lamps emit light from the top surface of the lamp housing.