发明名称 TRANSPORT UNIT AND TRANSPORT APPARATUS
摘要 <p>PURPOSE: A transfer unit and a transfer apparatus are provided to increase transfer efficiency by preventing a long system stop period. CONSTITUTION: A base member (11) includes a bottom wall and a pair of sidewalls. The bottom wall is extended in a transfer direction. The sidewalls are erected on both sides of the bottom wall. A transfer device (12) transfers a transfer object. A position determining device (13) determines the position of the transfer object.</p>
申请公布号 KR20130111354(A) 申请公布日期 2013.10.10
申请号 KR20130031906 申请日期 2013.03.26
申请人 HIRATA CORPORATION 发明人 HIRASAWA YOICHI
分类号 G01R31/20;B65G47/14;G01R31/26;H01L21/66 主分类号 G01R31/20
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