发明名称 |
INSPECTION DEVICE AND IMAGING ELEMENT |
摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device capable of acquiring large image data at a high speed while suppressing an increase in size of a circuit, and an imaging element used for the inspection device.SOLUTION: Imaging elements 32L and 32H used for an inspection device include: a plurality of photoelectric output-type photoelectric elements 33; a plurality of sample hold circuits 34b respectively connected to the corresponding photoelectric element 33; an analog multiplexer 34c connected to the plurality of sample hold circuits 34b; an analog-digital conversion circuit 34d connected to the analog multiplexer 34c; and a package 35 that accommodates these components. |
申请公布号 |
JP2013210229(A) |
申请公布日期 |
2013.10.10 |
申请号 |
JP20120079551 |
申请日期 |
2012.03.30 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORP |
发明人 |
JINGU TAKAHIRO |
分类号 |
G01N21/956;H01L21/66;H04N5/378 |
主分类号 |
G01N21/956 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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