发明名称 INSPECTION DEVICE AND IMAGING ELEMENT
摘要 PROBLEM TO BE SOLVED: To provide an inspection device capable of acquiring large image data at a high speed while suppressing an increase in size of a circuit, and an imaging element used for the inspection device.SOLUTION: Imaging elements 32L and 32H used for an inspection device include: a plurality of photoelectric output-type photoelectric elements 33; a plurality of sample hold circuits 34b respectively connected to the corresponding photoelectric element 33; an analog multiplexer 34c connected to the plurality of sample hold circuits 34b; an analog-digital conversion circuit 34d connected to the analog multiplexer 34c; and a package 35 that accommodates these components.
申请公布号 JP2013210229(A) 申请公布日期 2013.10.10
申请号 JP20120079551 申请日期 2012.03.30
申请人 HITACHI HIGH-TECHNOLOGIES CORP 发明人 JINGU TAKAHIRO
分类号 G01N21/956;H01L21/66;H04N5/378 主分类号 G01N21/956
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