| 摘要 |
A levitation air plate (1) provided with: a top plate (2) in which a plurality of suction holes (2d) and air ejection holes (2c) penetrating to a lower surface (2b) from an upper surface (2a) are arranged in alternating fashion as viewed from the upper surface, the top plate (2) having counterbored parts (2e) on the lower-surface side for each of the plurality of air ejection holes; an orifice sheet (3) having a plurality of orifices (3c) penetrating to a lower surface (3b) from an upper surface (3a) in positions corresponding to the counterbored parts of the top plate, and having communicating holes (3d) communicated one-to-one with the suction holes of the top plate and penetrating to the lower surface from the upper surface; and bottom-side plates (4), (5) having an air supply channel (4c) and a supply air hole (5c) for supplying air to all of the orifices formed in the orifice sheet, and an air suction channel (4d) and a suction hole (5d) for suctioning air from all of the communicating holes communicated with the suction holes. |
